C-Shroud Ring for Etching Equipment
Price:¥
Limit the distribution range of plasma in the vacuum chamber, increase the plasma density to improve the etching rate and enhance the directionality of the etching ions.
The products can be divided into single-piece and two-in-one types.
The 2-in-1 design offers better competitiveness in terms of service life through maintenance and reuse, helping customers achieve cost innovation.
CSR is a core component of 3D-NAND etching machines, and it is essential for etching machines used in high-end 3D NAND processing with over 100 layers. Currently, the global 3D-NAND etching machine market is monopolized by LAM, and only LAM's etching machines use CSR components.
• CSR is one of the key technologies for developing domestically produced 3D-NAND etching equipment, and there are no domestic manufacturers capable of supplying CSR reliably.
• Suppliers of Samsung and Hynix, such as COMA, WORLDEX, and SKENPULSE, also supply their CSR for Samsung/Hynix as OEMs in OS.
• The supplier providing CSR to Changcun domestically is Ziniu, and its source of goods is also OS.
• Starting at the end of 2023, the company began expanding its overseas clients, including Micron in Singapore, Kioxia in Japan, and Nan Ya in Taiwan. Additionally, it gradually shifted its supply model from processing supplied materials to providing finished products, in order to enhance the company's competitiveness.
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