Silicon electrode products for etching equipment Price：￥

Ordinary flat electrodes, curved electrodes, etc.
The surface of the silicon electrode has dense tiny through-holes. In the wafer manufacturing etching process, the silicon electrode serves not only as an electrode for applying additional voltage but also as a passage for the etching gas to enter the chamber.
Taking the spray head as an example, it is made of silicon, the core silicon component in etching equipment. Its surface is covered with hundreds or even thousands of tiny pores, which are used to evenly distribute plasma onto the wafer surface to precisely remove the oxide layer, thereby completing the etching process. As an important consumable, the spray head has a service life of about 30 days and needs to be replaced regularly.

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