Silicon ring for etching equipment
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The silicon ring is a supporting component for the silicon electrode and other related parts, ensuring the sealing and cleanliness of the plasma dry etching machine chamber, while also protecting the edges of the silicon wafer. Consumables such as silicon rings that support the silicon wafer are widely used, and some components have a relatively short replacement cycle of about 10 days.
Ordinary silicon wafers and 8/12-inch electrode products have been domestically produced, but the yield is not high, and the gross profit is generally low or in a loss-making state.
• Electrodes with complex curved surfaces that are difficult to manufacture do not yet have mass production companies in China.
• Significantly improve electrode processing yield through automation of processing equipment
• Primarily produces high-end electrode products with an average of over 900 gas holes, and has significantly improved processing yield through automated processing equipment.
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